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www.cnbc.com]
ASML aux Pays-Pas. exclusivité mondiale. records de finesse.
rayons ultra UV ... déviés par des miroirs Zeiss exclusifs, 'les surfaces plates les plus parfaites du monde',
'Lenses & Mirrors : extrem complex optics' :
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www.asml.com]
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"Since most materials absorb EUV light, the lenses would absorb the light in the system. Instead, we developed a brand-new optical system that uses ultra-smooth, multilayer mirrors inside a vacuum chamber" ....
"The mirrors are polished to a smoothness of less than one atom’s thickness" .....
""aspérités maxi d'1 mm sur une surface égale à celle de l'Allemagne"" .....
" ...next-generation EUV platform that increases the numerical aperture from 0.33 NA to 0.55 (‘High-NA’)"... ( ou l'inverse .. )
"The High-NA platform has been designed to enable multiple future nodes, starting at the 3 nm Logic node and followed by Memory nodes at similar density."
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